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From the INS archive · Published 27 May 1998

This release is shown as originally published. Names, products, figures and contact details reflect that time.

EG & G IC Sensors

New pressure sensor design increases accuracy and expands applications

/INS · 27 May 1998
5 languages
Long term accuracy, and linearity limitations of piezoresistive pressure sensors has restricted applications to relatively stable environments until now. Advances in EG&G IC Sensors' silicon, micromachined pressure sensors have reduced temperature dependence by a factor of 5, enabling wider applicability in portable instruments and process environments.

Named UltraStable, the TO-8 and HIT Series pressure sensors measure absolute, gage or differential pressure, with non-linearity of ±0.1% over spans within 0 to 17bar. The new design reduces span and zero and drift errors and produces a wider operating temperature performance of -20 to +85 C. The sensors are designed for low cost, high volume, embedded OEM applications in medical instrumentation, process control, calibration equipment and electronics; and in air flow management, avionics and leak detection apparatus.
Used as either primary sensors or for measurement compensation, pressure ranges for the TO-8 Series are 0 to 0.7bar and 0 to 17bar, and 0 to 0.7bar and 0 to 7bar for the HIT Series. Both models are configured for printed circuit board mounting and are interchangeable with the company's previous generation sensors.
Silicon, micromachined pressure sensors convert pressure to an electrical signal by detecting deflection in a silicon diaphragm. Deflection is measured by ion implanted resistors on the diaphragm. A newly designed silicon die, (the sensor diaphragm assembly), incorporating a modification in the boron ion dosage, combined with tighter production control, are at the heart of this performance breakthrough, the company reports.
High doping concentrations minimize temperature influenced effects, resulting in a more linear response over wider operating temperature limits. Such calibration stability improvements have special relevance to the accuracy of portable devices and industrial process instrumentation used in fluctuating temperature environments.
EG&G IC Sensors, located in Milpitas, California, USA, designs and manufactures silicon, micromachined pressure sensors, accelerometers and custom microstructures, which are marketed worldwide. UltraStable is a registered trademark of EG&G IC Sensors

For further information please contact:
Linda E. Duprel
EG&G IC Sensors
1701 McCarthy Boulevard
Milpitas, CA 95035, USA
Tel: +1 408 432 1800, Fax: +1 408 432 7322

New pressure sensor design increases accuracy and expands applications
New pressure sensor design increases accuracy and expands applications
About this release
  • Originally published on ins-news.com at /en/100/110/1578/new-pressure-sensor-design-increases-accuracy-and-expands-applications-medical-technology.htm.
  • Shown from the INS archive as it was published.

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